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Silicon Austria Labs and EV Group Strengthen Collaboration in Optical Technology Research

Expanded collaboration includes installation of EVG’s LITHOSCALE® maskless exposure system, EVG®7300 UV-NIL system and complementary resist processing systems FLORIAN / GRAZ, Austria, November 13, 2023—EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, and Silicon Austria Labs (SAL), Austria’s leading...

IFTLE 452: Samsung Foundry SRAM on Logic 3DIC   

Samsung Foundry SAINT-S Samsung Foundry revealed their SAINT-S technology for SRAM on logic 3DIC, at the recent IMAPS Device Packaging Conference, and it is certainly worthy of a closer look.  As shown in Figure 1, it is an SRAM on Logic 3DIC with 4µm TSV on 50µm pitch. It consists of...

The Heterogeneous Integration Competence Center™ combines EV Group’s world-class wafer bonding, thin-wafer handling, and lithography products and expertise, as well as pilot-line production facilities and services at its state-of-the-art cleanroom facilities (such as the one shown here).

Heterogeneous Integration Technology Gets its Own Competence Center

The team at EV Group has done it again. They looked around at where the microelectronics industry is headed, identified a gap and set out to fill it. This time, the gap fell in between research and development (R&D) and the ramp to manufacturing for customer products built using heterogeneous...

3D Stacking is Part of Life

Sitaram Arkalgud, VP 3D technologies, Invensas, provided the entertainment at last week’s IWLPC 2015. As soon as he realized Phil Garrou wasn’t in attendance, he reverted to using the 2.5D terminology, despite the fact that on numerous occasions, I have voiced my disdain for the term, preferring “interposer integration.” Arkulgud...

EV Group Receives 3D InCites Award for Gemini FB XT Automated Fusion Wafer Bonder

ST. FLORIAN, Austria, July 30, 2015—EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that it has received a 2015 3D InCites Award for its GEMINI®FB XT automated fusion wafer bonder in the category of 3D manufacturing equipment....

Kulicke & Soffa Stack the Dice for 2.5D and 3D IC Assembly

It’s been a long time coming, but Kulicke & Soffa has seen the writing on the wall, and it reads: “2.5D and 3D IC assembly is a hot market.” Why else would the wire-bond giant invest in developing a thermocompression chip-to-substrate (C2S) bonder for high-volume 2.5D and 3D IC die...

SUSS MicroTec Announces Follow-up Order for 300mm Bonding Tools for HVM 3D ICs

SUSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets has received a follow up purchase order for the latest generation of high volume manufacturing temporary bond clusters from a world-leading IDM (Integrated Device Manufacturer). The customer, who  installed SUSS MicroTec tools in 2012, plans...

SEMATECH Reports Advances in Bond Process for 3D Integration Development

With a focus on providing cost-effective and reliable solutions to accelerate manufacturing readiness of 3D technology options, SEMATECH experts reported new breakthroughs in wafer bonding at the 7th Annual Device Packaging Conference (DPC) on March 7-10 in Scottsdale, AZ. Technologists from SEMATECH’s 3D Interconnect program have demonstrated a novel die-to-wafer...