EV Group Rolls Out Next-Generation EVG120 Automated Resist Processing System for Micro-and Nano-Electronics Production
Flexible System Integrates Spin/Spray Coating and Wet Processing for MEMS, Advanced Packaging and Compound Semiconductor Applications SEMICON SINGAPORE, May 7, 2013—EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today introduced the latest version of its EVG®120 automated resist processing...



