CEA-Leti Introduces LETI-3S (Silicon Specialty Solutions) Concept

Grenoble- based research institute, CEA-Leti, has announced it will  focus on a new collaboration model for a wide range of industry oriented customers from start-ups to manufacturers. The unique, research-oriented, process and metrology tool set will offer:

  • Advanced single step processes to high-end process modules to realize some or the entire product or simply make a proof-of-concept demonstration;
  • Flexible customer owned processes to meet small manufacturing requirements through prototyping or small pre-series before transfer to commercial foundries;
  • Equipment access through the expertise of CEA-Leti engineers.

 LETI-3S for Silicon Specialty Solutions is targeting start-ups, component integrators, fabless or fablite companies, equipment or consumable suppliers. Other entities who might be interested include foundries or research centers with a limited processes offer, micro and nanotechnologies companies who don’t want low-volume activities, and high-value silicon wafers dealers.

3S addresses the following main domains:

  • Deposition
  • Front Side/Back Side cleanings, wet etch and stripping
  • Lithography with dual side alignment capability. LETI-3S can provide generic masks but usually works on customer designs adapted to CEA-Leti lithography tools.
  • Etching
  • Implantation, epitaxy, diffusion
  • CMP, bonding, grinding, dicing
  • Advanced in-line metrology

LETI-3S will operat out of the Minatec Campus in Grenoble on 24/7 200mm and 300mm technology platforms. Smaller wafer sizes should be available thanks to an innovative holder technology. LETI-3S can provide substrates or work on customers wafers, pre-processed or not, through stringent contamination protocols.

 ISO9001 certification reinforces CEA-Leti’s leadership position as an industry oriented research center. LETI-3S ensures full traceability from process flow conception to product delivery. SPC, FMEA, audits or conformance certificates to specifications are available according to the type of inquiry.

LETI-3S is totally in accordance with the CEA-Leti missions to create and to transfer innovations to the industry“, said Laurent Malier, CEO of CEA-Leti. “This is a great opportunity for us to give a simple access to our resources and thus enlarge significantly the panel of our industrial partners on different markets in our application domain.”