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SPTS Debuts Low-Temperature PECVD Technology for 3D-IC

SPTS Technologies has launched its low temperature plasma-enhanced chemical vapor deposition (PECVD) solution for via-reveal passivation in 3D-IC packaging applications. Already proven in 300mm volume production fabs, the Delta fxP® PECVD system deposits dielectric layers onto bonded substrates at wafer temperatures below 200°C,  with throughputs up to twice that of...

STATS ChipPAC Advances TSV Capabilities; Qualifies 300mm MEOL and Low Volume Manufacturing

Outsourced Semiconductor Assembly and Test (OSAT) provider, STATS ChipPAC Ltd., has announced qualification of its 300mm middle-end-of-line (MEOL) manufacturing operation for Through Silicon Via (TSV) capabilities, and will transition to low volume manufacturing.  STATS ChipPAC says it is firmly engaged with multiple strategic customers on TSV development programs that support the...

3D R&D Update, As Told by the Experts

The R&D centers were out in full force at this year’s SEMICON West, presenting on their latest activities in all areas of 3D technologies, from 3D transistors, to 3D ICS, to full-blown 3D Systems. I was able to attend a smattering of presentations at events hosted by imec, CEA-Leti, SEMATECH...

Georgia Tech PRC and Its Industry Partners Demonstrate World’s Thinnest 3D Organic Package at 130um Thickness, Ready for POP and Stacking

Georgia Tech’s Packaging Research Center, in its pioneering chip-last embedded interconnection technology, demonstrates World's Thinnest 3D Organic Package at 130um thickness at 30um interconnection pitch using ultra-short copper-copper  interconnections and bonding below 200oC for highest electrical performance. The "Ultra-SLIM Packages have built-in vertical connections to the top surface

Himax Technologies Selects EV Group to Expand Production Capacity for Wafer-Level Optics

Repeat Order for IQ Aligner Further Solidifies EVG’s Position as Leading Microlens Molding Solutions Provider for Wafer-level Camera Applications  St. Florian, AUSTRIA, March 27, 2012 – EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that Himax Technologies,...

SEMATECH to conduct rigorous manufacturability assessments to enable high volume manufacturing readiness of 3D technology

To enable high-volume production readiness of 3D-based products, SEMATECH’s 3D Interconnect and Manufacturability programs will be conducting Equipment Maturity Assessments (EMAs) of several critical 3D tools during 2012 to establish functional equipment capabilities and address high volume manufacturing maturity issues. The assessment is a cooperative effort among experts from SEMATECH’s...

IMAPS 3D Panel Presents United Front

Keith Cooper, Technology and Development, SET North America reports from 2010 IMAPS International , where he attended the 3D Panel, “Roadmap, Technical and Business Progress of 3D Integration and Packaging”. At the recent IMAPS Annual Meeting in Raleigh, NC, a panel of 3D experts addressed a series of questions moderated...

SEMATECH, SIA and SRC Team to Establish New Collaborative Program for Enabling 3D ICs

SEMATECH, the Semiconductor Industry Association (SIA), and Semiconductor Research Corporation (SRC) announced today they have established a new 3D Enablement program to drive cohesive industry standardization efforts and technical specifications for heterogeneous 3D integration.  Administered by SEMATECH’s 3D Interconnect program, based at the College of Nanoscale Science and Engineering (CNSE)