X-ray inspection

Update on  3D X-ray and DBI Technology for Advanced and 3D Packaging

Update on 3D X-ray and DBI Technology for Advanced and 3D Packaging

The Microelectronics Packaging & Test Engineering Council (MEPTEC) held its monthly meeting at SEMI in Milpitas on April 10.  Two speakers outlined their companies’ capabilities and demonstrated their own expertise in solving specific industry challenges. Tom Gregorich presented why and how Zeiss supports IC package inspection with 3D X-ray machines, then Sitaram Arkalgud conveyed the benef... »

Micro and Nano X-ray Tomography of 3D IC Stacks

Micro and Nano X-ray Tomography of 3D IC Stacks

Advanced packaging, and particularly 3D through silicon via (TSV) integration technologies and the resulting 3D-stacked products, challenge materials and process characterization. For 3D TSV stacking of wafers or dies, die-to-die interconnections like micro solder bumps (e.g. AgSn) and Cu pillars are used. The control of the TSV filling and micro-bump quality is a particular issue. In this present... »

The X-ray Metrology of TSVs and Wafer Bumps

The X-ray Metrology of TSVs and Wafer Bumps

Being able to look inside an object without opening it up or destroying it, and separating the different features within that would otherwise overlap each other when seen in a standard 2D X-ray image, are the same for the needs of electronics inspection on wafers and on printed circuit boards, as they are in the medical sphere. If there is a problem on a wafer (or a person!) ideally we want to ana... »

NORDSON Dage: XM8000 Wafer X-ray Metrology Platform

NORDSON Dage: XM8000 Wafer X-ray Metrology Platform

Fully automatic, in-line X-ray metrology platform for the measurement and defect capture of both optically hidden and visible features in wafers and 2.5D/3D IC packages. Available measurements include voiding, via fill, overlay and critical dimensions in TSVs, wafer bumps and MEMS. Testimonial: The XM8000 Wafer Metrology Platform provides a new and unique X-ray metrology platform for fast, automat... »

Automatic Wafer Metrology: Applying X-ray Technology in the 3D Space

Automatic Wafer Metrology: Applying X-ray Technology in the 3D Space

The way I see it, it was only a matter of time before Nordson DAGE brought its X-ray technology into the 2.5D and 3D IC space. The company has long been the leader for X-ray inspection in the electronics market and is now positioned to address the growing need for wafer metrology and defect review in features such as through silicon vias (TSVs). According to John Tingay, Technical Director Nordson... »

Europe in 3D

Europe in 3D: Nordson DAGE Sets Out to Measure the Invisible

What better place for the Queen of 3D to start out her Europe in 3D tour than a late lunch at the Crown Inn, in Colchester, Essex UK? I arrived in London on Monday afternoon, January 12, and was greeted by 3D InCites’ own Nick Richardson, business development manager (and unofficial court jester). We climbed aboard the chariot (aka Citroen Picasso) and headed to Colchester, UK to get our bearing... »

TSV Inspection

NORDSON: Newcomers to 3D ICs

This is part of a series of short interviews, based on face-to-face meetings at SEMICON West 2013. As 3D ICs get closer to volume manufacturing, we’re seeing newcomers joining the 3D IC party with solutions that help along established process flows, and fill in gaps. Longtime suppliers to the mainstream advanced packaging market, NORDSON Dage and NORDSON March, have each identified areas in 3D I... »