CMP Technology for the Next Generation of Substrates
Oct 06, 2025 · By Roland Rettenmeier · 3D In-Depth, Manufacturing
Latest Posts - Page 6
Rudolph Fulfills Multiple System Orders for TSV Inspection and Metrology
Rudolph Technologies, Inc., provider of process characterization equipment and software for the semiconductor, solar and LED industries, announced today that...SPTS Ships APS Etch System To Fraunhofer ISIT
SPP Process Technology Systems (SPTS) has shipped an APS etch system to Fraunhofer ISIT (FhG-ISIT). The system will add new...3D: You’ve Come a Long Way Baby!
This column by Francoise von Trapp appeared in the Jan/Feb 2011 issue of Chip Scale Review It sums up a...CEA-Leti Ramps up 300mm Line Dedicated to 3D-Integration Applications
Grenoble-based research institute, CEA-Leti, will significantly expand its technology offering this month when it ramps up one of Europe’s first...EV Group Teams with Industrial Technology Research Institute (ITRI) on Advanced MEMS Research and Development
ST. FLORIAN, Austria, June 1, 2011 – EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for...EV Group Introduces Industry’s First Fully Automated Wafer Bonding System for HB-LED Manufacturing
EVG560HBL Significantly Increases Throughput for Volume HB-LED Production
An In-Depth Look at Leti’s Common Lab with SPTS
When a research institute is evaluating different options for technology partnerships, what tips the scales in favor of one supplier...EVG Unveils EVG520L3 Next-Generation Wafer Bonding System with Key Cost-of-Ownership Advantages for Advanced Packaging and MEMS
New wafer bonder from EVG enables 3-5x throughput improvement for breakthrough cost-of-ownership performance SEMICON EUROPA, Dresden, Germany, October 19,...EV Groups’s Gemini Wafer Bonder Selected by MEMS Pioneer Sensonor for High-Volume Production of Thermal Imaging Devices
Order from Sensonor Enables EVG to Leverage Decades-long Expertise in Wafer Bonding to Support Emerging, High-growth MEMS Market SEMICON EUROPA,...Alchimer in Asia: Things are Cooking
I caught up with Alchimer CEO, Steve Lerner last week at the IWLPC in Santa Clara, to find out how...
TSVs Find Their Way into Prototypes
Designing and building a prototype MEMS device with TSVs in it is pretty much unheard of. As Alissa Fitzgerald, Ph.D.,...Progress is Progress in the Medical Device World
This was my second year attending the Medical Electronics Symposium, and I’m not sure what I was expecting, but when...SEMATECH Completes Fully-integrated 300mm Line for Via-mid 3D ICs
In an ongoing effort to drive 3D IC integration, SEMATECH’s 3D Interconnect program has completed its 300mm 3D IC pilot...EV Group Capitalizes MEMS Market Leadership, Further Diversifies Business with 3D IC and LED Manufacturing Technology Advances
Company to share key developments and highlights at SEMICON West
Wafer-Level Camera Manufacturer, Nemotek Technologie, selects EV Group’s Solutions for Capacity Ramp
Follow-on Order Demonstrates the Strength of EVG’s High-volume Manufacturing Solutions for Wafer-level Camera ApplicationsNew Realities for TSV Processing
In this article, published in the May/June 2010 issue of Chip Scale Review Magazine,...SEMATECH Technologists Detail Process Advances to Accelerate 3D Manufacturing Readiness
With a focus on providing cost-effective and reliable solutions to speed manufacturing readiness of 3D technology options, experts from SEMATECH’s...STATS ChipPAC takes eWLB to 300mm; paves the way for 3D eWLB
Embedded wafer level ball grid array (eWLB) technology has been a hot topic lately on 3D InCites, what with...
STATS ChipPAC implements 300mm manufacturing for eWLB technology
Semiconductor test and advanced packaging service provider (SATS) STATS ChipPAC announced it has has expanded embedded Wafer-Level Ball Grid...
Entrepix smooths the path to 3D integration
These days when someone says foundry service one more often than not thinks of large HVM facilities in Asia...
