Justus Liebig University Giessen to Use the Dual Platform for Next Generation microLED and Photocatalysis Applications

Plainview, N.Y., October 12, 2022 – Veeco Instruments Inc. (Nasdaq: VECO) announced today that it has received an order from Justus Liebig University Giessen (University of Giessen) for an integrated GENxplor® R&D Molecular Beam Epitaxy (MBE) and Fiji® Atomic Layer Deposition (ALD) system. The GENxplor MBE system enables the epitaxial growth of high-quality materials for III-nitride semiconductors for photonic and electronic applications focusing on material research and the development of cubic gallium nitride (GaN) material. This dual platform allows for in-vacuum wafer transfer from the GENxplor system to the plasma-enhanced Fiji ALD system and back, and will further enable research breakthroughs for applications such as microLEDs, optical memory and next generation materials for photocatalysis and water splitting.

According to Professor Sangam Chatterjee, Head of the University of Giessen Spectroscopy and Optics Group, the integrated GENxplor and Fiji systems were chosen because of Veeco’s process and system design expertise.

“The decision to partner with Veeco was based on their knowledge of the epitaxial process and their ability to realize an innovative solution that enables our research,” said Professor Chatterjee. “This gives my team confidence that working with Veeco will make our research go beyond established optoelectronics, developing new materials for photocatalysis towards the pressing goals of realizing regenerative energy production and storage.”

The GENxplor system deposits high quality epitaxial layers on substrates up to 3 inch in diameter. The GENxplor platform is known as a highly sophisticated and capable research system that is tailored to meet the unique challenges of leading-edge compound semiconductor material research and development.

The Fiji ALD System is an advanced thin film next-generation ALD system capable of performing thermal and plasma-enhanced deposition in a modular, high-vacuum, flexible architecture that accommodates a wide range of deposition modes using multiple configurations of precursors and plasma gases. The system’s intuitive interface makes it easy to monitor and change recipes and processes as required by customers.

“We are proud to have been selected by Professor Chatterjee and the research team at University of Giessen,” commented Ganesh Sundaram, Ph.D., Veeco’s Vice President of Research and Engineering Technology. “We have seen great interest in combining our proven MBE and ALD technologies to advance semiconductor device performance and this platform, delivered to Professor Chatterjee, exemplifies our ability to create novel solutions that allow our customers to solve difficult material challenges.”


About Veeco

Veeco (NASDAQ: VECO) is an innovative manufacturer of semiconductor process equipment. Our proven ion beam, laser annealing, lithography, MOCVD and single wafer etch & clean technologies play an integral role in the fabrication and packaging of advanced semiconductor devices. With equipment designed to optimize performance, yield and cost of ownership, Veeco holds leading technology positions in the markets we serve. To learn more about Veeco’s systems and service offerings, visit www.veeco.com.

Funding Source

This research initiative at the University of Giessen is being supported by the European Union and the European Regional Development Fund. The goal of this development fund is to strengthen economic, social and territorial cohesion in the European Union by correcting imbalances between its regions. This investment in a smarter, greener, more connected and more social Europe demonstrates the European Union’s aim to invest in the future of its citizens.



Veeco (NASDAQ: VECO) is an innovative manufacturer of semiconductor process equipment. Our proven ion beam,…

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