Investors include Onto Innovation, Lam Capital, UMC Capital, and MediaTek Capital

Multibeam Corp. announced that it has raised $31 million in Series B funds from global investors led by Onto Innovation Inc., a leader in process control solutions for advanced nodes and advanced packaging, and Lam Capital, the venture capital arm of Lam Research Corp., a global provider of wafer fabrication equipment and services for the semiconductor industry. Participants also include UMC Capital, the venture capital arm of UMC Corp., and MediaTek Capital, the venture capital arm of MediaTek Inc. Several leading financial and corporate investors also contributed to the oversubscribed round, alongside existing investors.

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Multibeam leads with a breakthrough multicolumn e-beam lithography solution for cost-effective production of leading-edge semiconductors…

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