SPP Process Technology Systems (SPTS) and its parent company Sumitomo Precision Products Co., Ltd (SPP),developers of plasma process technologies for manufacturing micro-electro mechanical systems (MEMS) and advanced semiconductor devices, today announced that they have sold their 300mm-compatible DRIE production tool to CEA-LETI in France. Named the “Pegasus300”, this latest tool is a natural evolution of the well-established 200mm “Pegasus” system, designed to address the needs of IC manufacturers. It will be used for etching through silicon vias (TSVs) as part of LETI’s 300mm CMOS line. Also included in this sale is a 200mm Pegasus system for LETI’s MEMS200 line.

Claude Massit, VP Heterogeneous Integration on Silicon at CEA-LETI, explained, “Throughout the highly competitive tender process we were impressed with the excellent process results and established European service infrastructure provided by SPTS, backed-up with the financial strength, focus and strategy of SPP and a new state-of-the-art Japanese manufacturing plant, where this tool was constructed. We consider SPTS/SPP as a major partner in DRIE with these 2 tools.”

Susumu Kaminaga, President of SPP and Chairman of SPTS replied, “SPP and SPTS are extremely pleased to be installing our Pegasus300 at such an important European research facility. By working closely together we have developed world-beating technology and can provide innovative equipment of the highest standard to our worldwide customer base.”


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