Garching, September 24, 2015 – SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor industry and related markets, has received an order for multiple SUSS MicroTec Photonic Systems lithography tools in Q3 2015 from a leading semiconductor manufacturer. The strategically important order includes multiple DSC300 Gen2 projection scanners, which are produced at the company’s facility in Corona, USA. The order volume is in the high single-digit million Euro range.

The SUSS DSC300 Gen2 offers comparable resolution and overlay performance, while providing significantly higher throughput and lower cost than traditional projection steppers. With this successful new product and technology qualification, the Company has enhanced its leadership position in the Advanced Packaging segment.

The tools are dedicated to high volume production of the fast growing fan-out wafer-level packaging technology. Delivery and installation will start already beginning of 2016.

“The DSC300 is the only system on the market that combines the advantages of full field exposure technology and projection lithography in one tool.” says Dr. Markus Arendt, General Manager of SUSS MicroTec Photonic Systems. “We are excited about the new opportunities this product brings to the Company. The extensive qualification process at our key customer demonstrates that the DSC300 Gen2 fully supports leading technology and cost targets.”

SUSS MicroTec

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