JetStep X500 Lithography System from Onto Innovation

The heterogeneous roadmap requires bigger packages, often produced on large panels. Onto Innovation’s JetStep X500 Lithography stepper is a unique solution to building chiplets, especially the large format panels the market demands. It combines a wide field of view with high-resolution optics to capture the entire package and accurately create interconnecting lines. And its physical size produces more packages in a single batch, while the precision lens and panel handling mechanism address issues of warpage common to large, thick materials. The JetStep X500 system maintains unrivaled focus, printing very fine lines and spaces with perfect precision, even across imperfect materials. And while other systems struggle to stitch together an entire package with several smaller images, the large lens diameter and field of view in the JetStep X500 system create the complete image of each package - or even multiple packages - in one shot.