Flanders, New Jersey (April 1, 2015)—Rudolph Technologies, Inc. (NYSE: RTEC) announced that a major semiconductor foundry and a top outsourced semiconductor assembly and test (OSAT) facility have placed multi-million dollar orders totaling approximately $17M for several NSX® Series and Wafer Scanner™ inspection systems. Several systems were shipped in the first quarter and the remaining will ship in the second quarter. The orders represent the increasing value of Rudolph’s flexible hardware and software solutions to meet the demanding wafer-level packaging applications semiconductor manufacturers are facing today.

The foundry customer will use the NSX systems for a rigorous application—high-volume inspection of the die boundary area on identity sensor devices. The OSAT will use the NSX and Wafer Scanner systems for 2D/3D defect and bump inspection and edge die chipping detection in the ramp of new copper (Cu) pillar bumping and wafer-level-chip-scale-packaging (WLCSP) lines for smartphone and automobile applications.

“We are pleased customers recognize our unique value proposition and selected Rudolph in a very competitive macro inspection market,” stated Mike Plisinski, executive VP and COO of Rudolph. “By working closely with industry leaders, we will continue to increase our capabilities leveraging all of Rudolph’s core technologies to provide comprehensive and cost-effective solutions to our customers.”

“Our foundry customer found the inspection of die boundaries on identity sensor devices, specifically in the street/kerf region, to be a novel challenge due to the varying test structures in the street. New advanced process materials are susceptible to defects in these areas, which were previously not of concern,” stated Mike Goodrich, vice president and general manager of Rudolph’s Inspection Business Unit. “This particular application involves reconstructed wafers that have unique types of defects that are difficult to distinguish from nuisance defects. Our NSX system offers advanced detection algorithms that were able to control this new region of yield concern at the high throughput levels required by the customer.

Goodrich added, “Our OSAT customer was looking to ramp their Cu pillar bump line fast and has come to rely on Rudolph for fully-automated inspection to reduce operation costs, enhance bumping and sawing quality and improve yield. At the customer’s request, we will also initiate an evaluation of our automatic defect and classification (ADC) software to further demonstrate process control yield improvement.”

The NSX family is the market leader for automated macro defect inspection for advanced packaging. The NSX system’s unique image processing technique was critical for the challenging kerf inspection application, where a traditional die-to-die comparison would not suffice. The Wafer Scanner Series provides three-dimensional (3D) inspection and bump height metrology required throughout post-fab processes for both standard and flip chip wafers.

For more information about Rudolph’s NSX Series and Wafer Scanner Inspection System, please visit www.rudolphtech.com.

About Rudolph Technologies
Rudolph Technologies, Inc. is a leader in the design, development, manufacture and support of defect inspection, advanced packaging lithography, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The Company’s expanding portfolio of equipment and software solutions is used in both the wafer processing and final manufacturing of ICs, and in adjacent markets such as FPD, LED and Solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the Company’s website at www.rudolphtech.com.

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include the benefits to customers of Rudolph’s products, Rudolph’s business momentum and future growth, Rudolph’s existing market position and its ability to maintain and advance such position relative to its competitors and Rudolph’s ability to meet the expectations and needs of our customers as well as other matters that are not purely historical data. Rudolph wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph’s control. Such factors include, but are not limited to, delays in shipping products for technical performance, component supply or other reasons, the company’s ability to leverage its resources to improve its positions in its core markets and fluctuations in customer capital spending. Additional information and considerations regarding the risks faced by Rudolph are available in Rudolph’s Form 10-K report for the year ended December 31, 2014 and other filings with the Securities and Exchange Commission.  As the forward-looking statements are based on Rudolph’s current expectations, the company cannot guarantee any related future results, levels of activity, performance or achievements. Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

Rudolph Contacts:

Steven R. Roth

Guerrant Associates
Laura Guerrant-Oiye

Trade Press:
Amy Shay

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