MEOL

TSV MEOL Process Flow for Mobile 3D IC Stacking

TSV MEOL Process Flow for Mobile 3D IC Stacking

Moore’s law is approaching physical limitations of CMOS scaling, and three dimensional (3D) integration technologies have been proposed as solutions. Wide band transmission between logic and memory is becoming indispensable for not only mobile products, but also other products related to network systems such as servers and data centers. These days, 3D integration with Through Silicon Vias (T... »